Precursor delivery systems


Best in class precursor delivery

CHEM’BOT’s are state of the art liquid chemical delivery systems. CHEM’BOT supplies precursor chemicals to bubblers or vaporizers, direct liquid injections or on-board buffer tank.

More than a decade of experience ensures ultra-high purity liquid supply - safely and with the SEMPA quality promise. All of our systems have a proven and deliberate control unit. A PLC facilitates easy monitoring and process steering. The user interface is intuitive and clear for safe handling. CHEM’BOT is suitable to supply to single and multiple points-of-use making it the perfect choice for lab or fab.

CHEM‘BOT is available in three basic versions (SMART, PRO, EXPERT) meeting different process needs and budgets. The System can furthermore be adapted very precisely to your requirements through a variety of available options.


General Features

CHEM'BOT is designed and built to the highest quality standards to meet the high demands of our customers.  Primarily built for the requirements of the semiconductor industry, CHEM'BOT is also suitable for many other industries and applications.


Ultra high purity components

Easy to maintain

Highest safety


Fully automated

Leak protection

Redundant design

SMART FeaturesPRO FeaturesEXPERT Features
  • Automated liquid precursor feed system
  • Safe supply of dangerous (toxic or pyrophoric) precursor chemicals
  • Used in all CVD, ALD processes
  • Cost optimized design
  • Fully automated dual supply vessel design
  • Safest setup for energetic and toxic precursor substances
  • Uninterrupted supply by automated switch over
  • Production oriented system design
  • Fully automated design with buffer tank for seamless precursor feed
  • Build according SEMI S2 standards
  • Dead space optimized design with highest redundancy
  • Designed for high demanding semiconductor fab operation

Tailored to each chemical and requirement

CHEM'BOT family covers all common containers. No matter whether a small container or several hundred liter BULK vessels. CHEM'BOT can be tailored to your chemistry, consumption and  process.

Our system operates with many materials: 

DEZn, TMAl, TMGa, TBAs, TPB, TEB, DADI, HMDSO, HCDS, TCS, TEOS, SO2, TEMAHf, TDMATi, TDMASn, M-DEOS, DEMS, OMCTS, BCHD, DIPAS, BDEAS, BTBAS, TiCl4, Hexane, Pyridine, ZAC, CpZr  and many more including low volatile monomers and organic precursors

Safely Managing Energetic Materials - CHEM'BOT EnMat


Energetic materials like pyrophorics such as Trimethylaluminum (and most other metal organics) used in numerous processes. However, pyrophoric substances do spontaneously ignite on air, hence carry an intrinsically huge risk for fire and potentially dangerous situation while they are used. There have been already too many even fatal incidents in the electronics industry using such precursor materials.

Together with our partner Basis Solutions LLC we have designed a fully integrated self-contained safety control system which monitors and controls the environment within the CHEM’BOT, while keeping a minimum footprint of the cabinet. In the event of a liquid leak, CHEM‘BOT EnMat will contain and abate any leaked pyrophoric metal organic without fire, damage, or particle contamination to the fab. Thus, CHEM’BOT EnMat provides maximum  incident mitigation and secures continuous production.

contact us

Contact us to get the optimal solution for your precursor.

sales (

SEMPA SYSTEMS GmbH    |    Grenzstraße 13    |    01109 Dresden    |    Germany
+49 (0) 351 888 10 0   |    info (

© 2023 by SEMPA SYSTEMS    |   german certified manufacturer of high precision equipment