Precursor delivery systems


Best in class precursor delivery

CHEM’BOT’s are state of the art liquid chemical delivery systems. CHEM’BOT supplies precursor chemicals to bubblers or vaporizers, direct liquid injections or on-board buffer tank.

More than a decade of experience ensures ultra-high purity liquid supply - safely and with the SEMPA quality promise. All of our systems have a proven and deliberate control unit. A PLC facilitates easy monitoring and process steering. The user interface is intuitive and clear for safe handling. CHEM’BOT is suitable to supply to single and multiple points-of-use making it the perfect choice for lab or fab.

CHEM‘BOT is available in three basic versions meeting different process needs and budgets. The System can furthermore be adapted very precisely to your requirements through a variety of available options.


General Features

CHEM'BOT is designed and built to the highest quality standards to meet the high demands of our customers.  Primarily built for the requirements of the semiconductor industry, CHEM'BOT is also suitable for many other industries and applications.


Ultra high purity components

Easy to maintain

Highest safety


Fully automated

Leak protection

Redundant design

Tailored to each chemical and requirement

CHEM'BOT family covers all common containers. No matter whether a small container or several hundred liter BULK vessels. CHEM'BOT can be tailored to your chemistry, consumption and  process.

Our system operates with many materials: 

DEZn, TMAl, TMGa, TBAs, TPB, TEB, DADI, HMDSO, HCDS, TCS, TEOS, SO2, TEMAHf, TDMATi, TDMASn, M-DEOS, DEMS, OMCTS, BCHD, DIPAS, BDEAS, BTBAS, TiCl4, Hexane, Pyridine, ZAC, CpZr  and many more including low volatile monomers and organic precursors

contact us

Contact us to get the optimal solution for your precursor.

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Grenzstraße 13
01109 Dresden

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SEMPA SYSTEMS GmbH    |    Grenzstraße 13    |    01109 Dresden    |    Germany
+49 (0) 351 888 10 0   |    info (

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