Best in class precursor delivery
CHEM’BOT’s are state of the art liquid chemical delivery systems. CHEM’BOT supplies precursor chemicals to bubblers or vaporizers, direct liquid injections or on-board buffer tank.
More than a decade of experience ensures ultra-high purity liquid supply - safely and with the SEMPA quality promise. All of our systems have a proven and deliberate control unit. A PLC facilitates easy monitoring and process steering. The user interface is intuitive and clear for safe handling. CHEM’BOT is suitable to supply to single and multiple points-of-use making it the perfect choice for lab or fab.
CHEM‘BOT is available in three basic versions (SMART, PRO, EXPERT) meeting different process needs and budgets. The System can furthermore be adapted very precisely to your requirements through a variety of available options.
CHEM’BOT - General Features
CHEM’BOT BULK - High-Volume Manufacturing Supply System
CHEM'BOT EnMat - Safely Managing Energetic Materials
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General Features
CHEM'BOT is designed and built to the highest quality standards to meet the high demands of our customers. Primarily built for the requirements of the semiconductor industry, CHEM'BOT is also suitable for many other industries and applications.
Ultra high purity components |
Easy to maintain |
Highest safety |
Fully automated |
Leak protection |
Redundant design |
| SMART Features | PRO Features | EXPERT Features |
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Tailored to each chemical and requirement
CHEM'BOT family covers all common containers. No matter whether a small container or several hundred liter BULK vessels. CHEM'BOT can be tailored to your chemistry, consumption and process.
Our system operates with many materials:
DEZn, TMAl, TMGa, TBAs, TPB, TEB, DADI, HMDSO, HCDS, TCS, TEOS, SO2, TEMAHf, TDMATi, TDMASn, M-DEOS, DEMS, OMCTS, BCHD, DIPAS, BDEAS, BTBAS, TiCl4, Hexane, Pyridine, ZAC, CpZr and many more including low volatile monomers and organic precursors
CHEM’BOT BULK - High-Volume Manufacturing Supply System
CHEM’BOT BULK is a chemical delivery system for demanding applications in the semiconductor industry. The system was developed for the safe and reliable supply of precursors and supports continuous material delivery with the aim of uninterrupted production. Its flexible design allows CHEM’BOT BULK to be adapted to different process requirements, flow rates, and consumption volumes. The size of the vessels used can also be configured according to the respective requirements. |
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High Availability Through Reliable System Design
CHEM’BOT BULK uses distributed control and processing combined with a redundant design to achieve high system availability.
At the same time, the system has deliberately been designed to be simple and clearly structured. Unnecessary components are avoided, reducing maintenance requirements and further increasing system uptime. The straightforward design also supports operation and troubleshooting.Efficient Precursor Utilization
With Smart Vessel Empty Detection, CHEM’BOT BULK enables particularly thorough emptying of the precursor source tank. The system can empty the vessel below the level of the dip tube, helping to maximize utilization of the valuable precursor.
Safety for Demanding Processes
CHEM’BOT BULK was developed with the safety requirements of pyrophoric precursors in mind. The safety concept includes welded connections, top-mounted dip tubes, automatic pressure-relief mechanisms, and monitoring of pyrophoric risks using smoke sensors.
Integrated safety protocols ensure that valves, lines, and connections are brought into a safe state in the event of an incident.Automated Sequences for Safe Operation
Critical operations such as vessel replacement, system qualification, and initial commissioning are supported by automated programs in combination with guided manual actions.
A central dashboard provides information on the current system status, including interface signals, precursor fill levels, and general operating conditions. When manual intervention is required, the HMI guides the user through the necessary procedures with clear navigation and step-by-step instructions.Modular Design and Flexible Scalability
The modular concept of CHEM’BOT BULK enables adaptation and expansion according to individual customer requirements. The planned plug-and-play upgrade path allows the system to scale, for example, with an increasing number of connected tools, higher precursor consumption, or growing requirements for availability and redundancy.
The system configuration is also flexible: two precursor vessels can be housed in separate cabinets and controlled via a central controller. Alternatively, a separate control box can be provided for each cabinet.
Options for Individual Requirements
CHEM’BOT BULK can be supplemented with various options. These include regulated pressure supply and filtration for push and purge gas, as well as a degasser that removes dissolved push gas from the chemical by means of vacuum.
For source tank monitoring, scales are available for precise weight-based determination of the remaining chemical quantity, as well as a valve-mounted level sensor. Additional available options include pneumatic valves for the supply tank, solutions for fire, gas, leak, and coaxial-pipe monitoring, and supply tank cooling.
In the event of a power failure, a second input power supply via a UPS network can also be provided.
Utility Requierements
| Dimensions | 2 Pcs x (2000 x 1600 x 2400 mm) |
| Weight | 2 x Approx. 500 kg |
| Power | 110-240V AC / 50-60HZ |
| Push Gas | ¼” female VCR |
| Purge Gas | ¼” female VCR |
| Pneumatic | ¼" compression fitting |
| Vacuum | ½” female VCR |
| Exhaust | Ø DN 4" (101.6 mm) Buttweld |
| Chemical Outlet(s) | According to customer flow requirement |
CHEM'BOT EnMat - Safely Managing Energetic Materials
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Energetic materials like pyrophorics such as Trimethylaluminum (and most other metal organics) used in numerous processes. However, pyrophoric substances do spontaneously ignite on air, hence carry an intrinsically huge risk for fire and potentially dangerous situation while they are used. There have been already too many even fatal incidents in the electronics industry using such precursor materials. Together with our partner Basis Solutions LLC we have designed a fully integrated self-contained safety control system which monitors and controls the environment within the CHEM’BOT, while keeping a minimum footprint of the cabinet. In the event of a liquid leak, CHEM‘BOT EnMat will contain and abate any leaked pyrophoric metal organic without fire, damage, or particle contamination to the fab. Thus, CHEM’BOT EnMat provides maximum incident mitigation and secures continuous production. |
 | Contact us to get the optimal solution for your precursor.sales (hello@spam.com) sempa.de |
| SEMPA SYSTEMS GmbH Grenzstraße 13 01109 Dresden Germany |  |
 +49 (0) 351-888 10 0  +49 (0) 351-888 10 15 x sales@sempa.de | Dr. Pia Küsgens Commercial Director pia.kuesgens@sempa.de |
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