Gas and chemical supply systems need to follow a stringent design concept. Most gases or chemicals used in nowadays production processes require highest purity environments to ensure product integrity as well as safe handling. Our products GAS’BOT, CHEM’BOT and VAPOR’BOT are based on such engineering guidelines.
Each system features:
Whether to use smart, pro or expert is defined by your specific process requirements.
GAS’BOT cabinets do stand for ultra high purity and safety in specialty gas supply. Toxic, inert, corrosive and pyrophoric gases are applied in numerous industrial processes. Automatic routines, clear design and intelligent sensors ensure highest quality and safety. Through years of experience in the semiconductor and photovoltaic industry, SEMPA developed a family of gas cabinets. GAS‘BOT is available in three basic versions meeting different process needs and budgets. GAS’BOT can furthermore be adapted very precisely to your specific requirements through a variety of available options.
SMART cabinets offer a cost-effective solution at prime quality standards, realizing best in class Cost of Ownership. The construction is optimized for economic efficiency without compromising safety nor quality.
You get a professional dual cylinder cabinet for continuous gas supply to point of use. With advanced controls, process monitoring functionality and better connectivity our PRO Series offers more possibilities for process optimization, making it the right choice for any production application.
Our EXPERT system is specifically designed for use in the semiconductor industry. This fully redundant system guarantees maximum reliability of supply and uptime. EXPERT stands for the utmost in gas cabinet technology and production equipment.
Many additional features have been pre-engineered. This makes it easy customizing your GAS’BOT to your specific needs.
CHEM’BOT supplies precursor chemicals to bubblers or vaporizers, direct liquid injections or on-board buffer containers.
More than a decade of experience ensures ultra-high purity liquid supply - safely and with the SEMPA quality promise. All of our systems have a proven and deliberate control unit. A PLC facilitates easy monitoring and process steering. The user interface is intuitive and clear for safe handling. CHEM’BOT is suitable to supply to single and multiple points-of-use making it the perfect choice for lab or fab.
CHEM‘BOT is available in three basic versions meeting different process needs and budgets. The System can furthermore be adapted very precisely to your requirements through a variety of available options.
SMART cabinets offer a cost-effective solution at prime quality standards, realizing best in class CoO (Cost of Ownership). The construction is optimized for economic efficiency without making any compromise to safety nor quality.
A professional dual container liquid delivery system for uninterrupted supply. With advanced controls, process monitoring functionality and better connectivity our PRO Series offers more possibilities for process optimization and control, hence it is the right choice for any production application.
EXPERT is our high-end flagship system meeting all requirements of nowadays 24/7 high tech production fabs. It features a buffer tank for seamless supply and advanced connectivity to integrate your CHEM’BOT into your fab monitoring system.
The high quality product is a guarantee for maximum reliability and uptime. EXPERT stands for the utmost in liquid delivery technology and production equipment.
Many additional features have been pre-engineered which makes it easy customizing your CHEM’BOT to your specific requirements.
Precursor evaporation is required for all gas phase processes. SEMPA has been developing VAPOR’BOT to address this brought range of applications. The evaporation technologies applied range from vaporizers over bubbler systems towards advanced direct liquid injection (DLI) units. Whether you require extremely high evaporation rates, ultra-stable concentrations or highest flexibility in flow rates, you will find your solutions within the VAPOR’BOT family of products.
SMART cabinets offer a cost-effective solution at prime quality standards, realizing best in class CoO (Cost of Ownership). The construction is optimized for economic efficiency without making any compromise to safety nor quality. Your SMART solution utilizes a bubbler system for evaporation.
Your PRO system is a bubbler based system for high volume manufacturing including an integrated refill system for seamless supply of precursor vapor, being able feeding multiple points-of-use. PRO stands for high process control and efficient evaporation for epi, CVD and ALD.
Your EXPERT solution is based on Direct Liquid Injection (DLI). Many years of field experience have proven that large evaporation rates require more advanced solutions than standard bubbling. SEMPA’s proprietary DIRECT VAPOR solutions ensure extremely efficient and reliable vapor supply. EXPERT is designed as central bulk vapor supply system, hence you are able to connect multiple points-of-use to one EXPERT system, making it the cost attractive multi tool fab solution.
Many additional features have been pre-engineered which makes it easy customizing your VAPOR’BOT to your specific requirements. Important options are our TOGGLE and concentration measurement modules. Those give you highest redundancy and detailed process monitoring capabilities.
Call our experienced process engineers who will assist you with the evaporation of precursors for your innovative process.
SEMPA LAB is constantly striving for new inventions and solutions for our customers. Our R&D activities and JDP’s (Joint Development Programs) with renowned national and international cooperation partners are also looking into advanced measurement technologies which are required for nowadays high end manufacturing processes. The main focus has been on transfer rates of permeates through barrier materials and certain sensing technology.
HiBarSens® measures water vapor transfer rates through barrier materials. Beyond mechanical protection, packaging material for food and pharmaceuticals have another important further function: They have to protect the products against atmospheric gases. Especially water vapor and oxygen are critical to the quality of these products. Novel flexible optoelectronic devices such as OLED’s and organic solar cells require barrier properties which are in the range of (WVTR) < 10-6 g[H2O] m-2 d-1.
HiBarSens® is meeting those requirements from research and industry to measure WVTR down to this range.
To learn more visit www.hibarsens.com
It is our daily business dealing with dangerous substances. Those can be toxic, explosive and pyrophoric gases and chemicals. Therefore safety is the primary focus on our activities. This starts from design of our systems, through operating procedures till customer training. Therefore we are offering dedicated and unique safety solutions for various applications.
ECS1 is an automatic mechanical shut-off system. Dangerous, flammable or toxic gases are applied in numerous industrial processes. ECS1 is a highly efficient method of switching off dangerous gases directly at the source in emergency situations. It is designed to prevent gas explosion and gas poisoning caused by leakage of highly pressurized gases.
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