SUPPLY’BOTs
unique delivery cabinets
We do offer bulk and specialty gas cabinets, advanced precursor chemical supply solutions and
innovative evaporation systems. Within our product family GAS’BOT, CHEM’BOT and VAPOR’BOT
you will find a solution for your specific application – safe, reliable and optimized to your needs.
| PRODUCT LINE GAS’BOT | Our GAS’BOT family of systems supplies stable and efficiently bulk and specialty gases to point of use. |
| | PRODUCT LINE CHEM’BOT | CHEM’BOT is the choice for any liquid feed. It’s unique design is unsurpassed in safety and reliability. |
| | PRODUCT LINE VAPOR’BOT | Our VAPOR’BOTs enable safe and efficient evaporation of any kind of precursor molecules. |
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| MEASUREMENT TECHNOLOGYinnovative metrology for improved process control | | MEASUREMENT TECHNOLOGY HiBarSens® | HiBarSens® measures water vapor transfer rates through barrier materials. |
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our products