CHEM'BOT

• Automated liquid precursor feed system
• Safe supply of dangerous (toxic or pyrophoric) precursor chemicals
• Used in all CVD, ALD processes
• Cost optimized design

• Fully automated dual supply vessel design
• Safest setup for energetic and toxic precursor substances
• Uninterrupted supply by automated switch over
• Production oriented system design

• Fully automated design with buffer tank for seamless precursor feed
• Build according SEMI S2 standards
• Dead space optimized design with highest redundancy
• Designed for high demanding semiconductor fab operation

Energetic materials like pyrophorics such as Trimethylaluminum (and most other metal organics) used in numerous processes. However, pyrophoric substances do spontaneously ignite on air, hence carry an intrinsically huge risk for fire and potentially dangerous situation while they are used. There have been already too many even fatal incidents in the electronics industry using such precursor materials.

Together with our partner Basis Solutions LLC we have designed a fully integrated self-contained safety control system which monitors and controls the environment within the CHEM’BOT, while keeping a minimum footprint of the cabinet. In the event of a liquid leak, CHEM‘BOT EnMat will contain and abate any leaked pyrophoric metal organic without fire, damage, or particle contamination to the fab. Thus, CHEM’BOT EnMat provides maximum  incident mitigation and secures continuous production.