VAPOR'BOT

The VAPOR’BOT SOLID is an advanced solution for the reliable evaporation of solid precursors in demanding semiconductor processes such as ALD, CVD, and EPI. It enables the precise and reproducible generation of a stable vapor phase from solid materials, providing a key foundation for consistent process quality and high yield.

The system combines high-temperature operation with active pressure and temperature control to ensure stable and controlled delivery even for materials with low vapor pressure characteristics, such as MoO₂Cl₂. A dual heating concept, along with heated valves, prevents condensation and ensures uniform process conditions.

An integrated pump system, precise pressure control, and comprehensive sensor technology ensure a constant material flow and maximum process stability. At the same time, the VAPOR’BOT Solid enables very high precursor utilization, significantly reducing operating costs.

Special focus is placed on safety and reliability: high-quality, corrosion-resistant materials, comprehensive monitoring systems, and features such as gas detection, emergency shutdown, and multi-level safety concepts ensure safe operation in both R&D environments and high-volume manufacturing.

The VAPOR’BOT Solid transforms solid precursor evaporation into a stable and scalable process platform, supporting the transition to modern, fluorine-free materials in semiconductor manufacturing.