SEMPA constantly strives to improve or invent new products and services. Our unique SEMPA LAB offers you Joint Development Projects (JDP) which help you shorten time to market and reach faster and deeper understanding about the use of novel precursor chemistry. Internal R&D projects look at whats next finding solutions for the challenges of tomorrow.
Tomorrows technology requirements are a constant driver for SEMPA. In order to support our customers we have been creating an industry unique innovation laboratory. SEMPA LAB is setup to design, test, prototype and optimize next generation technology processes. Nowadays high tech industries have a constant need for novel materials. Typically such novel materials are created by means of vapor deposition techniques such as CVD, PECVD, ALD, Epitaxy and other film deposition technologies. For those materials novel precursor chemicals have to be applied where in many cases the properties of the chemicals are not yet fully know, or where the chemicals exhibit a rather dangerous nature or the precursors have to be handled under special conditions. SEMPA LAB offers the possibility working with such novel precursor in a safe environment. Our area of expertise and possibilities at SEMPA LAB span from:
Due to the very reactive properties of TMAl there had been many reports in the industry of clogged lines by particles which caused in some cases very serious safety issues. At SEMPA LAB we have been doing intensive studies on best handling procedures for TMAl in direct liquid injection systems. Especially for deposition processes which require very high evaporation rates the requirements on such equipment are rather demanding. Based on detailed studies at SEMPA LAB we could develop a seamlessly working product. Our VAPOR’BOT family of vaporizers are specifically available for pyrophoric precursors like TMAl enabling safe use and preventing clogging and related downtime.
Many novel precursor materials whether they are inorganic or organic to exhibit a very low vapor pressure which makes evaporation a challenge. Beside this also purging of lines before source cylinder exchange are maintenance is also challenging. To prevent getting in contact with dangerous or toxic precursor materials a thorough cleaning of the piping and connection system is crucial, otherwise safe handling and seamless operation cannot be assured. At SEMPA LAB we have been doing extensive purging studies for different classes of such precursor molecules. For purging either inert gases or appropriate solvents have been applied. Our CHEM’BOT liquid delivery systems can specifically be adapted to such precursors chemistries ensuring customers highest uptime operation and safe handling for operator personal.
H2020-EU.2.1.1. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)
ECSEL-2020-1-IA - ECSEL-IA
Improved technology for 3D nanoprinting
GaN4AP project has the ambitious target of making the GaN-based electronics to become the main power active device present in all power converter systems, with the possibility of developing a close-to-zero energy loss power electronic systems.
End date: 31 May 2024
Verbundprojekt „H2Demo“ des Bundesministeriums für Bildung und Forschung (BMBF) innerhalb des ausgelobten Ideenwettbewerbs „Wasserstoffrepublik Deutschland“
Fraunhofer-Instituts für Solare Energiesysteme ISE (federführend), AZUR SPACE, Helmholtz Zentrum Berlin, HQ Dielectrics, LayTec AG, Philipps Universität Marburg, Plasmetrex GmbH, SEMPA SYSTEMS GmbH, Technische Universität Ilmenau, Technische Universität München sowie Universität Ulm
Nachhaltige und umweltverträgliche Herstellung großer Mengen Wasserstoff durch direkte solare Wasserstofferzeugung über photoelektrochemische Prozesse
Darunter versteht man die Absorption des Sonnenlichts in einem Halbleitermaterial, welches selbst eine ausreichend große Photospannung (> 1.6 Volt) generiert, um Wasser direkt in Wasserstoff und Sauerstoff zu zerlegen. Es eignen sich insbesondere Tandem-Absorber, bei denen zwei absorbierende Materialien elektrisch seriell verschaltet werden. Zu den Arbeitspaketen in „H2-Demo“ zählt die Optimierung der III-V Tandem-Absorber, die auf Silicium abgeschieden werden und deren Eigenschaften weiter verbessert und auf die spezifische Anwendung hin optimiert werden müssen.
Seitens der SEMPA SYSTEMS wird für einen neu zu entwickelnden Hochdurchsatz-MOVPE-Reaktor ein innovatives Gasmischsystem nebst Ansteuerung entwickelt und gebaut.
H2020-EU.3. - PRIORITY 'Societal challenges
H2020-EU.2.1. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies
EIC-FTI-2018-2020 - Fast Track to Innovation (FTI)
Improved technology for 3D nanoprinting
Nanolithography comprises a growing field of techniques within nanotechnology concerning the engineering of structures on a nanometre scale. The field is of particular interest to computer engineering, providing experts the opportunity to create super-high density microprocessors and memory chips. Among the biggest market challenges in the field is reducing costs and time spent on the prototyping and fabrication process as well as being able to utilise a broader range of materials. The EU-funded ATOPLOT project aims to address those challenges and improve the capabilities of the ATLANT3D Nanofabricator for 3D nanoprinting technology.
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