Research & Development

Innovative solutions from Dresden/Germany

q  Management  |  Career  |  R&D

We are solving tomorrows challenges

SEMPA constantly strives to improve or invent new products and services. Our unique SEMPA LAB offers you Joint Development Projects (JDP) which help you shorten time to market and reach faster and deeper understanding about the use of novel precursor chemistry. Internal R&D projects look at whats next finding solutions for the challenges of tomorrow.


Unique possibilities through SEMPA LAB

Tomorrows technology requirements are a constant driver for SEMPA. In order to support our customers we have been creating an industry unique innovation laboratory. SEMPA LAB is setup to design, test, prototype and optimize next generation technology processes. Nowadays high tech industries have a constant need for novel materials. Typically such novel materials are created by means of vapor deposition techniques such as CVD, PECVD, ALD, Epitaxy and other film deposition technologies. For those materials novel precursor chemicals have to be applied where in many cases the properties of the chemicals are not yet fully know, or where the chemicals exhibit a rather dangerous nature or the precursors have to be handled under special conditions. SEMPA LAB offers the possibility working with such novel precursor in a safe environment. Our area of expertise and possibilities at SEMPA LAB span from:

  • Vaporization studies and design of vaporizers for novel precursor materials for both
    • Liquid precursors
    • Solid precursors
  • Design and test of bulk distribution solutions
  • Material and parts compatibility tests
  • Optimizing of purging and flushing prcocedures
  • Handling of very sensitive precursor materials
    • Pyrophorics
    • Corrosives
    • Inorganic as well as organic substances
    • …plus many more



High flow rate Trimethylaluminum (TMAl) vaporizer

Due to the very reactive properties of TMAl there had been many reports in the industry of clogged lines by particles which caused in some cases very serious safety issues. At SEMPA LAB we have been doing intensive studies on best handling procedures for TMAl in direct liquid injection systems. Especially for deposition processes which require very high evaporation rates the requirements on such equipment are rather demanding. Based on detailed studies at SEMPA LAB we could develop a seamlessly working product. Our VAPOR’BOT family of vaporizers are specifically available for pyrophoric precursors like TMAl enabling safe use and preventing clogging and related downtime.

Enabling novel low vapor pressure materials

Many novel precursor materials whether they are inorganic or organic to exhibit a very low vapor pressure which makes evaporation a challenge. Beside this also purging of lines before source cylinder exchange are maintenance is also challenging. To prevent getting in contact with dangerous or toxic precursor materials a thorough cleaning of the piping and connection system is crucial, otherwise safe handling and seamless operation cannot be assured. At SEMPA LAB we have been doing extensive purging studies for different classes of such precursor molecules. For purging either inert gases or appropriate solvents have been applied. Our CHEM’BOT liquid delivery systems can specifically be adapted to such precursors chemistries ensuring customers highest uptime operation and safe handling for operator personal.


Current funded research activities

  • H2Demo


    Verbundprojekt „H2Demo“ des Bundesministeriums für Bildung und Forschung (BMBF) innerhalb des ausgelobten Ideenwettbewerbs „Wasserstoffrepublik Deutschland“


    Fraunhofer-Instituts für Solare Energiesysteme ISE (federführend), AZUR SPACE, Helmholtz Zentrum Berlin, HQ Dielectrics, LayTec AG, Philipps Universität Marburg, Plasmetrex GmbH, SEMPA SYSTEMS GmbH, Technische Universität Ilmenau, Technische Universität München sowie Universität Ulm


    Nachhaltige und umweltverträgliche Herstellung großer Mengen Wasserstoff durch direkte solare Wasserstofferzeugung über photoelektrochemische Prozesse

    Darunter versteht man die Absorption des Sonnenlichts in einem Halbleitermaterial, welches selbst eine ausreichend große Photospannung (> 1.6 Volt) generiert, um Wasser direkt in Wasserstoff und Sauerstoff zu zerlegen. Es eignen sich insbesondere Tandem-Absorber, bei denen zwei absorbierende Materialien elektrisch seriell verschaltet werden. Zu den Arbeitspaketen in „H2-Demo“ zählt die Optimierung der III-V Tandem-Absorber, die auf Silicium abgeschieden werden und deren Eigenschaften weiter verbessert und auf die spezifische Anwendung hin optimiert werden müssen.

    Seitens der SEMPA SYSTEMS wird für einen neu zu entwickelnden Hochdurchsatz-MOVPE-Reaktor ein innovatives Gasmischsystem nebst Ansteuerung entwickelt und gebaut.

    14 Millionen Euro des BMBF für das Gesamtprojekt

    Frühjahr 2021 – Frühjahr 2026


    Funding Program

    H2020-EU.3. - PRIORITY 'Societal challenges

    H2020-EU.2.1. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies


    EIC-FTI-2018-2020 - Fast Track to Innovation (FTI)

    Improved technology for 3D nanoprinting

    Nanolithography comprises a growing field of techniques within nanotechnology concerning the engineering of structures on a nanometre scale. The field is of particular interest to computer engineering, providing experts the opportunity to create super-high density microprocessors and memory chips. Among the biggest market challenges in the field is reducing costs and time spent on the prototyping and fabrication process as well as being able to utilise a broader range of materials. The EU-funded ATOPLOT project aims to address those challenges and improve the capabilities of the ATLANT3D Nanofabricator for 3D nanoprinting technology.

    Funding Code
    ID: 950785

    Funding period
    1 May 2020 to: 30 April 2022

  • Hybrid CVD (SME innovative)

    Funding Program
    SME innovative

    Development of specific evaporation technology for deposition of inoraganic and organic precursors with very low vapor pressures

    Funding Code

    Funding period
    01.07.2018 – 30.06.2021



  • SimPerm (SAB EFRE)

    Funding Program
    SAB EFRE-technology funding

    Measurement system for simultaneous measuremenr of OTR (oxygen transmission rate) and WVTR (water vapor transmission rate) of ultra barrier films

    Funding Code

    Funding period
    01.09.2018 – 31.08.2021




    Funding Program
    SAB EFRE-Technology funding

    Atomic Layer Processing

    • Research into processes and technologies in the field of few atomic layers based on atomic layer deposition (ALD) and atomic layer etching (ALE)
    • Establishment and expansion of competence for material processing and characterization in the field of nanotechnology specifically for these techniques in the German research landscape of industry and universities
    • Investment in information and communication technology, especially micro- and nanoelectronics and microsystems technology (reference to the BMBF's High-Tech Strategy for Germany)


    Funding Code

    Funding period
    01.10.2018 – 30.09.2021


Grenzstraße 13
01109 Dresden

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SEMPA SYSTEMS GmbH    |    Grenzstraße 13    |    01109 Dresden    |    Germany
+49 (0) 351 888 10 0   |    info (

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