Research & Development

Innovative solutions from Dresden/Germany

q  Management  |  Career  |  R&D

We are solving tomorrows challenges

SEMPA constantly strives to improve or invent new products and services. Our unique SEMPA LAB offers you Joint Development Projects (JDP) which help you shorten time to market and reach faster and deeper understanding about the use of novel precursor chemistry. Internal R&D projects look at whats next finding solutions for the challenges of tomorrow.


Unique possibilities through SEMPA LAB

Tomorrows technology requirements are a constant driver for SEMPA. In order to support our customers we have been creating an industry unique innovation laboratory. SEMPA LAB is setup to design, test, prototype and optimize next generation technology processes. Nowadays high tech industries have a constant need for novel materials. Typically such novel materials are created by means of vapor deposition techniques such as CVD, PECVD, ALD, Epitaxy and other film deposition technologies. For those materials novel precursor chemicals have to be applied where in many cases the properties of the chemicals are not yet fully know, or where the chemicals exhibit a rather dangerous nature or the precursors have to be handled under special conditions. SEMPA LAB offers the possibility working with such novel precursor in a safe environment. Our area of expertise and possibilities at SEMPA LAB span from:

  • Vaporization studies and design of vaporizers for novel precursor materials for both
    • Liquid precursors
    • Solid precursors
  • Design and test of bulk distribution solutions
  • Material and parts compatibility tests
  • Optimizing of purging and flushing prcocedures
  • Handling of very sensitive precursor materials
    • Pyrophorics
    • Corrosives
    • Inorganic as well as organic substances
    • …plus many more



High flow rate Trimethylaluminum (TMAl) vaporizer

Due to the very reactive properties of TMAl there had been many reports in the industry of clogged lines by particles which caused in some cases very serious safety issues. At SEMPA LAB we have been doing intensive studies on best handling procedures for TMAl in direct liquid injection systems. Especially for deposition processes which require very high evaporation rates the requirements on such equipment are rather demanding. Based on detailed studies at SEMPA LAB we could develop a seamlessly working product. Our VAPOR’BOT family of vaporizers are specifically available for pyrophoric precursors like TMAl enabling safe use and preventing clogging and related downtime.

Enabling novel low vapor pressure materials

Many novel precursor materials whether they are inorganic or organic to exhibit a very low vapor pressure which makes evaporation a challenge. Beside this also purging of lines before source cylinder exchange are maintenance is also challenging. To prevent getting in contact with dangerous or toxic precursor materials a thorough cleaning of the piping and connection system is crucial, otherwise safe handling and seamless operation cannot be assured. At SEMPA LAB we have been doing extensive purging studies for different classes of such precursor molecules. For purging either inert gases or appropriate solvents have been applied. Our CHEM’BOT liquid delivery systems can specifically be adapted to such precursors chemistries ensuring customers highest uptime operation and safe handling for operator personal.


Current funded research activities

  • GaN4AP for Advanced Power Applications

    Funding Program

    H2020-EU. - ECSEL

    H2020-EU.2.1.1. - INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)


    ECSEL-2020-1-IA - ECSEL-IA

    Improved technology for 3D nanoprinting

    GaN4AP project has the ambitious target of making the GaN-based electronics to become the main power active device present in all power converter systems, with the possibility of developing a close-to-zero energy loss power electronic systems.
    GaN4AP project will…
    1. Develop innovative Power Electronic Systems for power conversion and management with advanced architecture and circuit topology based on state of the art GaN-based High Electron Mobility Transistors (HEMTs) available in a new concept high-frequency packages that can achieve the requested 99% power conversion efficiency.
    2. Develop an innovative material (Aluminium Scandium Nitride, AlScN) that combined with advanced growth and process solutions can provide outstanding physical properties for highly efficient power transistors. Therefore, a new HEMT device architecture will be fabricated with much higher current (2x) and power density (2x) than existing transistors.
    3. Develop a new generation of vertical power GaN-based devices on MOSFET architecture with vertical p-GaN inversion channel for safe power switching up to 1200 V. We will cover all the production chain from the device design, processing and characterization up to tests in low inductance half bridge power modules and their implementation in high speed power switching systems.
    4. Develop a new intelligent and integrated GaN solutions (STi2GaN) both in System in Package (SiP) and Monolithic variances, that will allow the generation of E-Mobility power converters. The projects will focus on scalable concept for 48V-12V bidirectional Buck Boost converters for conventional and ADAS applications combining, in a novel wire-bond free package, a state of the art BCD driver & controller along with a common substrate Monolithic 100V e-GaN Half Bridge.
    The development of new device technologies and innovative power circuits, employing the GaN-based devices is a crucial factor for the world-wide competitiveness of EU industries.

    Funding Code
    Grant agreement ID: 101007310

    Funding period
    Start date: 1 June 2021

    End date: 31 May 2024

  • H2Demo


    Verbundprojekt „H2Demo“ des Bundesministeriums für Bildung und Forschung (BMBF) innerhalb des ausgelobten Ideenwettbewerbs „Wasserstoffrepublik Deutschland“


    Fraunhofer-Instituts für Solare Energiesysteme ISE (federführend), AZUR SPACE, Helmholtz Zentrum Berlin, HQ Dielectrics, LayTec AG, Philipps Universität Marburg, Plasmetrex GmbH, SEMPA SYSTEMS GmbH, Technische Universität Ilmenau, Technische Universität München sowie Universität Ulm


    Nachhaltige und umweltverträgliche Herstellung großer Mengen Wasserstoff durch direkte solare Wasserstofferzeugung über photoelektrochemische Prozesse

    Darunter versteht man die Absorption des Sonnenlichts in einem Halbleitermaterial, welches selbst eine ausreichend große Photospannung (> 1.6 Volt) generiert, um Wasser direkt in Wasserstoff und Sauerstoff zu zerlegen. Es eignen sich insbesondere Tandem-Absorber, bei denen zwei absorbierende Materialien elektrisch seriell verschaltet werden. Zu den Arbeitspaketen in „H2-Demo“ zählt die Optimierung der III-V Tandem-Absorber, die auf Silicium abgeschieden werden und deren Eigenschaften weiter verbessert und auf die spezifische Anwendung hin optimiert werden müssen.

    Seitens der SEMPA SYSTEMS wird für einen neu zu entwickelnden Hochdurchsatz-MOVPE-Reaktor ein innovatives Gasmischsystem nebst Ansteuerung entwickelt und gebaut.

    14 Millionen Euro des BMBF für das Gesamtprojekt

    Frühjahr 2021 – Frühjahr 2026

  • KoReMO 2.0

    Overall project description


    Federal Ministry of Economics and Climate Protection (BMWK)

    Research Framework Program:

    7th Energy Research Program of the Federal Government "Research for an environmentally friendly, reliable and affordable energy supply"

    Promotion focus:


    Collaborative project:


    Joint project coordinator:

    Dockweiler Chemicals GmbH

    Joint project partners:

    Fraunhofer Institute for Solar Energy Systems ISE,
    AZUR SPACE Solar Power GmbH

    Project management:

    Dockweiler Chemicals GmbH

    Dr. Jörg Koch

    35041 Marburg

    Phone: 06421 - 396380

    Email: joerg.koch (

    Running time:

    01.02.2023 - 31.01.2026


    36 months


    Cost reduction and increased resource efficiency through new supply systems for metal-organic starting materials in the epitaxy of III-V high-performance solar cells 2.0

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01109 Dresden

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