GAS'BOT

ultra-high purity gas cabinets

Gas Cabinets for your specific applications

SEMPA’s GAS’BOT family of specialty gas cabinets have been designed meeting all kinds of different applications and requirements.

We do offer three different basic versions (SMART, PRO, EXPERT) with a huge variety of optional features which enables us to precisely adapt the cabinet solution to your specific technical and budgetary requirements. All classes of cabinets have in common a stringent focus on safety, streamlined design and the pick of durable and high quality components, following the SEMPA quality promise.

The GAS’BOT family of supply systems is based on several decades of experience and know how in handling toxic, pyrophoric or corrosive specialty gases. A high degree of flexibility and several connectivity options allow easy integration into your LAB or FAB.

General Features

 

Ultra high purity components

Easy to maintain

Highest safety

Fully automated

Temperature controlled

Redundant design

Leak tested

Clean manufacturing

Application optimized

 

Configure your GAS'BOT

Many options help to configure the system exactly to your application and type of gas. Please contact us to customize your GAS'BOT. Our experienced engineers will be happy to assist you.

  • Safety Options

    Toxic, pyrophoric and corrosive gases are applied in many applications. GAS'BOT has a number of safety options to ensure safe use.

     
    • UV-IR Sensor
    • Smoke Sensor
    • Gas Sensors
     
     
    • ECS-1
    • Coaxial piping and monitoring
    • ATEX certified
     

     

  • Temperature Options

    For some processes, gases must be kept at exactly the right temperature. GAS'BOT can be easily adapted to your temperature requirements.

    • Cylinder Heating - To increase vapour pressure of liquefied gas.
    • Cylinder Cooling - For some vacuum processes gases like HF or WF6 have to be cooled.
    • Panel Heating - To avoid freezing of at high gas flows
    • Trace Heating - To avoid condensation inside lines
  • Prozess Options

    Special processes require special material or a special design. GAS'BOT can be adapted to any gas and process.

    • Low vapor pressure optimized

    GAS'BOT can be optimized for heavy gases with low vapour pressure. This enables an optimized gas supply for your processes.

    • High alloy steels

    Highly corrosive gases such as HFAc or F2 attack welding seams and 316L stainless steel. GAS'BOT can be build in higher alloy steels to avoid corrosion.

    • Cylinder scale

    For liquefied gas a scale is recommended for level monitoring

     

Your GAS'BOT for every application

GAS‘BOT is available in three basic versions meeting different process needs and budgets. GAS’BOT can furthermore be adapted very precisely to your requirements through a variety of available options.

 
GAS'BOTSmartProExpert

Dimensions

450x600x2200

600x800x2400

600x800x2400

Number of cylinders

1

2

2

Container Size

up to B50

up to B50

up to B50

Uninterrupted Supply

NO

YES

YES

Fully redundant setup

NO

NO

YES

Touch Screen size

5"

7" to 12"

7" to 12"

Outlets

1

up to 4

up to 4

Control of pneumatic
cylinder valves

YES

YES

YES

 

 

  • SMART

    GAS’BOT SMART cabinets offer a cost-effective solution at prime quality standards, realizing best in class Cost of Ownership. The construction is optimized for economic efficiency without compromising safety nor quality.

     

     

    Dimension:
    450 (w) × 2200 (h) × 600 (d)

    Weight:
    approx 150 kg
    Electrical Connection:
    110 - 240 V-AC (10-A-Fuse)
    50/60 Hz
    UPS

    Inlets:
    1 × ¼" VCR Purge Inlet (5 – 7 bar)
    1 × ¼" Swagelok Connection Utility
    Nitrogen

    Outlets:
    1 × ¼" VCR male Process lines
    1 × ¼" VCR male Exhaust

     

     

  • PRO

    GAS‘BOT PRO is a professional dual cylinder cabinet for continuous gas supply to point of use. With advanced controls, process monitoring functionality and better connectivity our PRO Series is the right choice for any production application.

    Dimension:
    800 (w) × 2315 (h) × 600 (d)

    Weight:
    approx 220 kg

     

    Electrical Connection:
    110 - 240 V-AC (10-A-Fuse)
    50/60 Hz
    UPS

     

    Inlets:
    1 × ¼" VCR Purge Inlet (5 – 7 bar)
    1 × ¼" VCR Venturi Inlet (5 – 7 bar)
    1 × ¼" Swagelok Connection Utility

    Outlets:
    1 × ¼" VCR male Process lines
    1 × ¼" VCR male Exhaust

     

     

  • EXPERT

    Our EXPERT system is specifically designed for use in the semiconductor industry. GAS’BOT EXPERT is a fully redundant system and it guarantees maximum reliability of gas supply, highest uptime, best purgability and optimized maintenance procedures. EXPERT stands for the utmost in gas cabinet technology and production equipment.

    Dimension:
    800 (w) × 2315 (h) × 600 (d)

    Weight:
    approx 220 kg

     

    Electrical Connection:
    110 - 240 V-AC (10-A-Fuse)
    50/60 Hz
    UPS

     

    Inlets:
    2 × ¼" VCR Purge Inlet (5 – 7 bar)
    2× ¼" VCR Venturi Inlet (5 – 7 bar)
    1 × ¼" Swagelok Connection Utility

    Outlets:
    1 × ¼" VCR male Process lines
    2 × ¼" VCR male Exhaust

     

     

GAS’BOT is suitable to supply single and multiple point of use making it the perfect choice for lab or fab.

Contact us to get the optimal solution for your application.

SEMPA SYSTEMS GmbH
Grenzstraße 13
01109 Dresden
Germany

null +49 (0)351-888 10 0 
null +49 (0) 351-888 10 15  
x sales (hello@spam.com) sempa.de

SEMPA SYSTEMS GmbH    |    Grenzstraße 13    |    01109 Dresden    |    Germany
+49 (0) 351 888 10 0   |    info (hello@spam.com) sempa.de

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