q Epitaxy & CVD | ALD / ALE | More than Moore | Custom Evaporators
Modern LED, Laser Diode or high frequency/power devices are based on compound semiconductors which are manufactured by metal organic vapor phase epitaxy (MOVPE). The standard process utilizes on board precursor ampoules, so called bubblers to evaporize Trimethylgallium (TMGa), Trimethylaluminum (TMAl), Trimethylindium (TMIn) and many more precursors.
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Our VAPOR’BOT’s disruptive technology enables various significant improvements to the standard process. VAPOR’BOT centrally generates precursor vapor and transports precursor vapor readily mixed in carrier gas to a number of deposition tools. This causes significant improvements on:
In cooperation with Umicore SEMPA has developed a novel method to evaporize the solid precursor TMIn. This liquid TMInTMprocess solves the long-term issue of reduced growth rates of Indium containing material systems.
Our VAPOR’BOT family of vaporizers can also boost your performance.
On this topic SEMPA is currently active in a development project together with AIXTRON, AZUR SPACE Solar Power, Fraunhofer ISE und UMICORE.
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