Joining forces for the future – H2DEMO, a collaborative project involving 11 partners from research and industry, aims to demonstrate that direct water splitting is not only technically feasible but also economically viable.
The project’s goal is to develop the first large-scale demonstrators for direct solar hydrogen production. A new high-throughput epitaxial reactor is being developed, capable of depositing gallium arsenide phosphide layers on standard silicon substrates with a size of 156x156 mm² in just a few minutes.
To supply the reactor, our SEMPA team has manufactured a fully automated precursor supply system capable of supporting over 20 gas and bubbler sources.
The complexity of this supply system is evident from its sheer size: over 5 meters long, 1.3 meters wide, and more than 2 meters high. It integrates more than 60 MFCs and PCs as well as over 100 pneumatic devices. These components are managed by our software, which synchronizes the requirements from the reactor with our supply system. This state-of-the-art precursor supply system precisely controls process parameters such as flow rate, temperature, pressure, and precursor concentration.
Safety has been a top priority, with a wide range of safety sensors and signals, along with automatic safety routines integrated as needed.
H2DEMO - A key to a Sustainable Hydrogen Economy!






