GAS'BOT

ultra-high purity gas cabinets

r GAS'BOT  |  CHEM'BOT |  VAPOR'BOT

Gas Cabinets for your specific applications

SEMPA’s GAS’BOT family of specialty gas cabinets have been designed meeting all kinds of different applications and requirements.

We do offer three different basic versions (SMART, PRO, EXPERT) with a huge variety of optional features which enables us to precisely adapt the cabinet solution to your specific technical and budgetary requirements. All classes of cabinets have in common a stringent focus on safety, streamlined design and the pick of durable and high quality components, following the SEMPA quality promise.

The GAS’BOT family of supply systems is based on several decades of experience and know how in handling toxic, pyrophoric or corrosive specialty gases. A high degree of flexibility and several connectivity options allow easy integration into your LAB or FAB.

GAS'BOT Titelbeschreibung

 

General Features

GAS'BOT is designed and built to the highest quality standards to meet the high demands of our customers.  Primarily built for the requirements of the semiconductor industry, GAS'BOT is also suitable for many other industries and applications.

 

Ultra high purity components

Easy to maintain

Highest safety

   

Fully automated

Temperature controlled

Redundant design

We configure your next GAS'BOT

Many options help to configure the system exactly to your application and type of gas. Please contact us to customize your GAS'BOT. Our experienced engineers will be happy to assist you.

Available Safety Options

Numerous dangerous gases are commonly use. GAS'BOT has a number of safety options to protect against risk of fire, corrosion or accidential release of gas.

 
  • UV-IR Sensor
  • ECS-1
 
 
  • Smoke Sensor
  • Coaxial Piping and Monitoring
 
 
  • Gas Sensor
  • ATEX
 

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UV-IR Sensor:

Every GAS'BOT is very versatile. Any bottle size, type of valve or connection can be accomodated through a huge range of adapters or a custom build feature. Please ask your SEMPA expert for your specific solution.

 

Smoke Sensor:

If flammable or pyrophoric gases are applied fire protection is mandatory. A smoke sensor is in general first detector of choice as usually fumes and particles will be generated already if only small amounts of such energetic materials do react. Can be combined with a UV-IR sensor to have two independent methods for fire detection. 

 

Gas Sensor:

For a variety of dangerous gases specific, highly sensitive sensors are available to detect traces of molecules. The sensor is installed in the exhaust duct at the cabinet. A forced ventilation ensures that cabinet atmosphere gets continously directed to the gas sensor. 

 

ECS-1:

The SEMPA emergency cylinder shutter is a highly recommended safety component for dangerous gases which are supplied in gas bottles featuring manually operated valves. ECS-1 is applied on the manual valve and automatically shuts the valve within 100ms in case of emergency.

 

Coaxial Piping and Monitoring:

Corrosive gases may react with stainless steel tubing. In order to monitor corrosion and to protect the facility against gas leakage coaxial piping can be applied. The gas flows through the inner tubing whereas the outer tubing is continously pressure monitored. Both break of inner tube as well as outer tube can be detected.

 

ATEX:

Gases which can form explosive mixtures in air need to be protected against spark formations from electric components like switches or formation of electric discharge. Building the system accoring ATEX, meaning explosion proof rules out such possible sources of ignition. 

Temperature Control Options

For certain processes, gases must be specificall temperature controlled. A variety of options adapts your GAS'BOT to the sepcific needs.

 
  • Cylinder Heating
  • Trace Heating
 
 
  • Cylinder Cooling
 
 
  • Panel Heating
 

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Cylinder Heating:

For liquified gases like propane thermodynamic cooling in case of expansion (Joule-Thomson Effect) could significantly affect the evaporation rates. To ensure stable flows of gases cylinder heating can be applied to compensate for Joule-Thomson effect. 

 

Cylinder Cooling:

Certain vacuum deposition processes require for optimal conditions liquified gases like HF or WF6 to be specifically cooled. Every GAS'BOT can be equipped with cylinder cooling sleeves including temperature monitoring in order to keep gas bottles in the optimal temperature range.

 

Panel Heating:

During pressure expansion of gases it can happen that components like pressure regulators may freeze (Joule-Thomson-Effect). The optional panel heating is an efficient way to protect components from unintentional freezing and it avoids ambient moisture to condensate on cold components.

 

Trace Heating:

For some liquified gases and special process conditions (like HFAc) trace heating of supply lines from bottle connection to point of use may be required. The line heating prevents condensation hence ensure stable and safe process conditions.

Process related Options

Certain processes require special components, materials of construction or an adapted design. GAS'BOT can be customized to any gas and process requirement.

 
  • Heavy Gas Optimization
  • Custom Cylinder
 
 
  • Higher Alloy Steel
 
 
  • Process Scales
 

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Heavy Gas Optimization:

GAS'BOT can be optimized for gases having high specific gravity (e.g. WF6). Such gases may exhibit challenges for stable and high flows. This upgrade option enables an optimized gas supply to your processes.

 

Higher Alloy Steel:

Highly corrosive gases such as HFAc or fluorine attack welding seams and 316L stainless steel. Process lines can optionally be build in higher alloy steels like hastelloy or monel to avoid corrosion and process contamination.

 

Process Scales:

In order to monitor fill levels of iquified gas bottles a scale is a effective measurement device. The scale can be installed at any GAS'BOT and fill level is monitored and displayed on the HMI.

 

Custom Cylinder:Every GAS'BOT is very versatile. Any bottle size, type of valve or connection can be accomodated through a huge range of adapters or a custom build feature. Please ask your SEMPA expert for your specific solution.

GAS'BOT available in three basic versions

We do offer three different basic versions with a huge variety of optional features which enables us to precisely adapt the cabinet solution to your specific technical and budgetary requirements. All classes of cabinets have in common a stringent focus on safety, streamlined design and the pick of durable and high quality components, following the SEMPA quality promise.

  • SMART

    GAS’BOT SMART cabinets offer a cost-effective solution at prime quality standards, realizing best in class Cost of Ownership. The construction is optimized for economic efficiency without compromising safety nor quality.

    Dimension
    450 (w) × 2200 (h) × 600 (d)

    Weight
    approx 150 kg

    Electrical Connection
    110 - 240 V-AC (10-A-Fuse)50/60 HzUPS

    Inlets
    1 × ¼" VCR Purge Inlet (5 – 7 bar)1 × ¼" Swagelok Connection UtilityNitrogen

    Outlets
    1 × ¼" VCR male Process lines1 × ¼" VCR male Exhaust

  • PRO

    GAS‘BOT PRO is a professional dual cylinder cabinet for continuous gas supply to point of use. With advanced controls, process monitoring functionality and better connectivity our PRO Series is the right choice for any production application.

    Dimension
    800 (w) × 2315 (h) × 600 (d)

    Weight
    approx 220 kg

    Electrical Connection
    110 - 240 V-AC (10-A-Fuse)50/60 HzUPS

    Inlets
    1 × ¼" VCR Purge Inlet (5 – 7 bar)1 × ¼" VCR Venturi Inlet (5 – 7 bar)1 × ¼" Swagelok Connection Utility

    Outlets
    1 × ¼" VCR male Process lines1 × ¼" VCR male Exhaust

  • EXPERT

    Our EXPERT system is specifically designed for use in the semiconductor industry. GAS’BOT EXPERT is a fully redundant system and it guarantees maximum reliability of gas supply, highest uptime, best purgability and optimized maintenance procedures. EXPERT stands for the utmost in gas cabinet technology and production equipment.

    Dimension
    800 (w) × 2315 (h) × 600 (d)

    Weight
    approx 220 kg

    Electrical Connection
    110 - 240 V-AC (10-A-Fuse)50/60 HzUPS

    Inlets
    2 × ¼" VCR Purge Inlet (5 – 7 bar)2× ¼" VCR Venturi Inlet (5 – 7 bar)1 × ¼" Swagelok Connection Utility

    Outlets
    1 × ¼" VCR male Process lines2 × ¼" VCR male Exhaust

 
GAS'BOTSmartProExpert

Dimensions (in mm)

450 × 600 × 2200

600 × 800 × 2400

600 × 800 × 2400

Number of cylinders

1

2

2

Container Size

up to B50

up to B50

up to B50

Uninterrupted Supply

NO

YES

YES

Fully redundant setup

NO

NO

YES

Touch Screen size

5"

7" to 12"

7" to 12"

Outlets

1

up to 4

up to 4

Control of pneumatic cylinder valves

YES

YES

YES

 

 

contact us

Contact us to get the optimal solution for your gas applikation.

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SEMPA SYSTEMS GmbH
Grenzstraße 13
01109 Dresden
Germany

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SEMPA SYSTEMS GmbH    |    Grenzstraße 13    |    01109 Dresden    |    Germany
+49 (0) 351 888 10 0   |    info (hello@spam.com) sempa.de

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