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GAS'BOT

Gaskabinette für jede Anwendung

r GAS'BOT | CHEM'BOT | VAPOR'BOT

Gaskabinette für spezifischen Anwendungen

SEMPAs GAS’BOT-Familie wurde für die unterschiedlichsten Anwendungen und Anforderungen entwickelt.

Das Portfolio umfasst drei verschiedene Basisversionen (SMART, PRO, EXPERT) mit einer Vielzahl von optionalen Ausstattungsmerkmalen, die es ermöglichen, das System exakt an die spezifischen technischen und budgetären Anforderungen anzupassen. Allen drei Versionen gemeinsam ist der strikte Fokus auf Sicherheit, stromlinienförmiges Design und die Auswahl langlebiger und qualitativ hochwertiger Komponenten, ganz im Sinne des SEMPA-Qualitätsversprechens.

Die SEMPA-Gasversorgungssysteme basieren auf zwei Jahrzehnten Erfahrung und Know-how im Umgang mit toxischen, pyrophoren oder korrosiven Spezialgasen. Ein hohes Maß an Flexibilität und verschiedene Anschlussmöglichkeiten ermöglichen eine einfache Integration in LAB oder FAB.

General Features

Der GAS'BOT wird entsprechend höchster Qualitätsstandards entworfen und gebaut, um so den hohen Anforderungen unserer Kunden gerecht zu werden. In erster Linie für den Einsatz in der Halbleiterindustrie hergestellt, eignet sich der GAS'BOT jedoch auch für viele andere Branchen und Anwendungen.

Ultra high purity components

Easy to maintain

Highest safety

Fully automated

Temperature controlled

Redundant design

Wir konfigurieren Ihren GAS'BOT

Viele Optionen helfen dabei, das System passend auf Ihre Anwendung und die eingesetzte Gasart zu konfigurieren. Bitte kontaktieren Sie uns, um Ihren GAS'BOT anzupassen. Unsere erfahrenen Ingenieure stehen Ihnen gern zur Verfügung.

Verfügbare Sicherheitsoptionen

Sehr häufig kommen gefährliche Gase zum Einsatz. Der GAS'BOT verfügt über eine Reihe von Sicherheitsoptionen zum Schutz vor Feuer, Korrosion oder versehentlicher Gasfreisetzung.

UV-IR Sensor
ECS-1
SEMI-S2

Smoke Sensor
Coaxial Piping and Monitoring

Gas Sensor
ATEX

MORE DETAILS >

CLOSE DETAILS
UV-IR Sensor:
Every GAS'BOT is very versatile. Any bottle size, type of valve or connection can be accomodated through a huge range of adapters or a custom build feature. Please ask your SEMPA expert for your specific solution.

Smoke Sensor:
If flammable or pyrophoric gases are applied fire protection is mandatory. A smoke sensor is in general first detector of choice as usually fumes and particles will be generated already if only small amounts of such energetic materials do react. Can be combined with a UV-IR sensor to have two independent methods for fire detection.

Gas Sensor:
For a variety of dangerous gases specific, highly sensitive sensors are available to detect traces of molecules. The sensor is installed in the exhaust duct at the cabinet. A forced ventilation ensures that cabinet atmosphere gets continously directed to the gas sensor.

ECS-1:
The SEMPA emergency cylinder shutter is a highly recommended safety component for dangerous gases which are supplied in gas bottles featuring manually operated valves. ECS-1 is applied on the manual valve and automatically shuts the valve within 100ms in case of emergency.

Coaxial Piping and Monitoring:
Corrosive gases may react with stainless steel tubing. In order to monitor corrosion and to protect the facility against gas leakage coaxial piping can be applied. The gas flows through the inner tubing whereas the outer tubing is continously pressure monitored. Both break of inner tube as well as outer tube can be detected.

ATEX:
Gases which can form explosive mixtures in air need to be protected against spark formations from electric components like switches or formation of electric discharge. Building the system accoring ATEX, meaning explosion proof rules out such possible sources of ignition.
SEMI-S2:
SEMI-S2 is the global safety standard for semiconductor related equipment.

Optionen zur Temperaturregelung

Für bestimmte Prozesse müssen Gase spezifisch temperiert werden. Eine Vielzahl von Optionen passt Ihren GAS'BOT an die jeweiligen Bedürfnisse an.

Cylinder Heating
Trace Heating

Cylinder Cooling

Panel Heating

MORE DETAILS >

CLOSE DETAILS
Cylinder Heating:
For liquified gases like propane thermodynamic cooling in case of expansion (Joule-Thomson Effect) could significantly affect the evaporation rates. To ensure stable flows of gases cylinder heating can be applied to compensate for Joule-Thomson effect.

Cylinder Cooling:
Certain vacuum deposition processes require for optimal conditions liquified gases like HF or WF6 to be specifically cooled. Every GAS'BOT can be equipped with cylinder cooling sleeves including temperature monitoring in order to keep gas bottles in the optimal temperature range.

Panel Heating:
During pressure expansion of gases it can happen that components like pressure regulators may freeze (Joule-Thomson-Effect). The optional panel heating is an efficient way to protect components from unintentional freezing and it avoids ambient moisture to condensate on cold components.

Trace Heating:
For some liquified gases and special process conditions (like HFAc) trace heating of supply lines from bottle connection to point of use may be required. The line heating prevents condensation hence ensure stable and safe process conditions.

Prozessbezogene Optionen

Bestimmte Prozesse erfordern spezielle Komponenten, Materialien oder ein angepasstes Design. Der GAS'BOT kann an jede Gas- und Prozessanforderung angepasst werden.

Heavy Gas Optimization
Custom Cylinder

Higher Alloy Steel

Process Scales

MORE DETAILS >

CLOSE DETAILS
Heavy Gas Optimization:
GAS'BOT can be optimized for gases having high specific gravity (e.g. WF₆). Such gases may exhibit challenges for stable and high flows. This upgrade option enables an optimized gas supply to your processes.

Higher Alloy Steel:
Highly corrosive gases such as HFAc or fluorine attack welding seams and 316L stainless steel. Process lines can optionally be build in higher alloy steels like hastelloy or monel to avoid corrosion and process contamination.

Process Scales:
In order to monitor fill levels of iquified gas bottles a scale is a effective measurement device. The scale can be installed at any GAS'BOT and fill level is monitored and displayed on the HMI.

Custom Cylinder: Every GAS'BOT is very versatile. Any bottle size, type of valve or connection can be accomodated through a huge range of adapters or a custom build feature. Please ask your SEMPA expert for your specific solution.

Drei GAS'BOT-Grundversionen

Wir bieten drei verschiedene Basisversionen mit einer Vielzahl von optionalen Ausstattungsmerkmalen an, so dass das System exakt an Ihre spezifischen technischen und budgetären Anforderungen angepasst werden kann. Allen Versionen gemeinsam ist der strikte Fokus auf Sicherheit, schlankem Design und dem Einsatz langlebiger und hochwertiger Komponenten - ganz im Sinne des SEMPA-Qualitätsversprechens.

Kontaktieren Sie uns für die optimale Lösung für ihre Gasanwendung.

sales (hello@spam.com) sempa.de

KONTAKT

SEMPA SYSTEMS GmbH
Grenzstraße 13
01109 Dresden
Germany

+49 (0)351-888 10 0
+49 (0) 351-888 10 15
sales (hello@spam.com) sempa.de

Datasheet SMART (english; PDF)

Datasheet PRO (english; PDF)

Datasheet EXPERT (english; PDF)

Datasheet O3-BOT (english; PDF)

SEMPA SYSTEMS GmbH | Grenzstraße 13 | 01109 Dresden | Germany
+49 (0) 351 888 10 0 | info (hello@spam.com) sempa.de

UV-IR Sensor:	Every GAS'BOT is very versatile. Any bottle size, type of valve or connection can be accomodated through a huge range of adapters or a custom build feature. Please ask your SEMPA expert for your specific solution.
Smoke Sensor:	If flammable or pyrophoric gases are applied fire protection is mandatory. A smoke sensor is in general first detector of choice as usually fumes and particles will be generated already if only small amounts of such energetic materials do react. Can be combined with a UV-IR sensor to have two independent methods for fire detection.
Gas Sensor:	For a variety of dangerous gases specific, highly sensitive sensors are available to detect traces of molecules. The sensor is installed in the exhaust duct at the cabinet. A forced ventilation ensures that cabinet atmosphere gets continously directed to the gas sensor.
ECS-1:	The SEMPA emergency cylinder shutter is a highly recommended safety component for dangerous gases which are supplied in gas bottles featuring manually operated valves. ECS-1 is applied on the manual valve and automatically shuts the valve within 100ms in case of emergency.
Coaxial Piping and Monitoring:	Corrosive gases may react with stainless steel tubing. In order to monitor corrosion and to protect the facility against gas leakage coaxial piping can be applied. The gas flows through the inner tubing whereas the outer tubing is continously pressure monitored. Both break of inner tube as well as outer tube can be detected.
ATEX:	Gases which can form explosive mixtures in air need to be protected against spark formations from electric components like switches or formation of electric discharge. Building the system accoring ATEX, meaning explosion proof rules out such possible sources of ignition.
SEMI-S2:	SEMI-S2 is the global safety standard for semiconductor related equipment.

Cylinder Heating:	For liquified gases like propane thermodynamic cooling in case of expansion (Joule-Thomson Effect) could significantly affect the evaporation rates. To ensure stable flows of gases cylinder heating can be applied to compensate for Joule-Thomson effect.
Cylinder Cooling:	Certain vacuum deposition processes require for optimal conditions liquified gases like HF or WF6 to be specifically cooled. Every GAS'BOT can be equipped with cylinder cooling sleeves including temperature monitoring in order to keep gas bottles in the optimal temperature range.
Panel Heating:	During pressure expansion of gases it can happen that components like pressure regulators may freeze (Joule-Thomson-Effect). The optional panel heating is an efficient way to protect components from unintentional freezing and it avoids ambient moisture to condensate on cold components.
Trace Heating:	For some liquified gases and special process conditions (like HFAc) trace heating of supply lines from bottle connection to point of use may be required. The line heating prevents condensation hence ensure stable and safe process conditions.

Heavy Gas Optimization:	GAS'BOT can be optimized for gases having high specific gravity (e.g. WF₆). Such gases may exhibit challenges for stable and high flows. This upgrade option enables an optimized gas supply to your processes.
Higher Alloy Steel:	Highly corrosive gases such as HFAc or fluorine attack welding seams and 316L stainless steel. Process lines can optionally be build in higher alloy steels like hastelloy or monel to avoid corrosion and process contamination.
Process Scales:	In order to monitor fill levels of iquified gas bottles a scale is a effective measurement device. The scale can be installed at any GAS'BOT and fill level is monitored and displayed on the HMI.
Custom Cylinder:	Every GAS'BOT is very versatile. Any bottle size, type of valve or connection can be accomodated through a huge range of adapters or a custom build feature. Please ask your SEMPA expert for your specific solution.